Output processing method and a scanning probe microscope of a scanning probe microscope

To provide a scanning probe microscope for vertical fine cantilever holding portion, it is not possible to isolate the deflection amount θ and vertical fine amount z of the cantilever from the measured output in the conventional optical lever method. A laser light source 18 incident light 19 emitted from the is reflected by the cantilever 13 top, the reflected light 19a is incident on the light detecting means 20. The incident light 19 reflected light 19a is in a plane not including the long axis of the cantilever 13. Since the incident light 19 reflected light 19a is in a plane not including the long axis of the cantilever 13, the movement of the reflected light 19a by vertical fine amount z changes deflection amount θ change of the cantilever 13, on the light detection means 20 a different direction. Accordingly, the vertical fine amount z changes deflection amount θ change of the cantilever 13, it is possible to isolate from the output of the light detecting means 20.