C-90％SiC涂层加热处理前后形貌特征及其阻氢性能的研究

The C-90% SiC coating deposited on stainless steel substrate by ion beam mixing process was heated and H(superscript +) implanted. Observing the morphologies of the samples by SEM before and after heating, the number and distribution of the bubbles on the coating surface were studied. AFM was used to investigate the relationship between the size and shape of particles and distrbution on the coating surface and the heating temperature. SEM-EDAX was used to show the changes in the composition of the coating through heating. And the secondary profile of hydrogen depth for the C-90% SiC coating by SIMS measurement showed that the hydrogen resistance of the C-90% SiC coatings can be effectively improved after heating.