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Greyscale 2D nanograting fabrication by multistep nanoimprint lithography and ion beam etching
Greyscale 2D nanograting fabrication by multistep nanoimprint lithography and ion beam etching
2020
Janek Buhl
Danbi Yoo
Markus Kopke
Martina Gerken
Keywords:
Nanoimprint lithography
Optoelectronics
Fabrication
Grayscale
ion beam etching
Materials science
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