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Mechanical properties of highly porous low-k dielectric nano-films: A Brillouin light scattering study
Mechanical properties of highly porous low-k dielectric nano-films: A Brillouin light scattering study
2013
J. Zizka
S. Bailey
Ebony Mays
David J. Michalak
R. Chebiam
Sean King
R. Sooryakumar
Keywords:
Brillouin zone
Nano-
Low-k dielectric
Brillouin scattering
Porosity
Optics
Light scattering
Materials science
highly porous
Optoelectronics
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