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Post-Processed Integrated Microsystems
Post-Processed Integrated Microsystems
2001
R. J. Shul
Stanley H. Kravitz
Todd R. Christenson
W. Kent Schubert
Stephen A. Casalnuovo
Kurt O. Wessendorf
T.E. Zipperian
Keywords:
Nanotechnology
Chemiresistor
Miniaturization
Microsystem
Surface acoustic wave
Process integration
Materials science
Circuit design
Electronic engineering
Etching
microelectronic circuits
Fabrication
Correction
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