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Studies of buried (SiC)1-x(AlN)x layers formed by co-implantation of N+ and Al+ ions into 6H-SiC
Studies of buried (SiC)1-x(AlN)x layers formed by co-implantation of N+ and Al+ ions into 6H-SiC
2017
Jörg Pezoldt
R.A. Yankov
M. Voelskow
G. Brauer
W. Anwand
V. Heera
W. Skorupa
P. G. Coleman
Keywords:
Ion
Inorganic chemistry
Materials science
co implantation
Crystallography
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