Preparation method of patterned substrate

The invention provides a method for preparing a patterned substrate from a heterogeneous material. The method comprises the following steps: preparing periodic patterns from a heterogeneous material; growing a single-crystal heterogeneous material with a certain thickness on a sapphire substrate; evenly coating photoresist on the sapphire substrate, on which the single-crystal heterogeneous material with a certain thickness grows, by using a spin-coating technique; forming the periodic patterns on the photoresist through exposure by using an exposure technique; and enabling the photoresist to show the periodic patterns by using a development technique, thus obtaining the periodic patterns prepared from the heterogeneous material; or proportionally layering the heterogeneous material and the sapphire to jointly form the patterned substrate having periodic patterns on the sapphire surface. The preparation method breaks through the characteristic that the traditional patterned substrate only uses the sapphire substrate to form periodic patterns, thereby achieving the purposes of enhancing the crystal growth quality and improving the light producing efficiency of a device.