Old Web
English
Sign In
Acemap
>
Paper
>
FTIR Analysis of Post-Oxidation in Microcrystalline Silicon Thin Films
FTIR Analysis of Post-Oxidation in Microcrystalline Silicon Thin Films
2014
D. Mataras
E. Amanatides
Angelos G. Kalampounias
E. Farsari
Keywords:
Thin film
Microcrystalline
Nanocrystalline silicon
Plasma-enhanced chemical vapor deposition
Materials science
Silicon
Fourier transform infrared spectroscopy
Inorganic chemistry
post oxidation
Chemical engineering
microcrystalline silicon
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]