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The effect of ion sheath evolution to conformal ion implantation of plasma-based ion implantation
The effect of ion sheath evolution to conformal ion implantation of plasma-based ion implantation
2000
K. Yukimura
S. Masamune
Keywords:
Computer science
Ion implantation
Plasma
Computer security
Atomic physics
Ion
Conformal map
ion sheath
Optoelectronics
Correction
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