Fast electrostatic discharges between a charged thin dielectric film and a spherical electrode with or without dielectric coating

Short-gap (less than 1 mm) electrostatic discharge (ESD) between a charged thin dielectric film on an earthed-plate electrode and a spherical electrode, connected to the plate, with or without an uncharged thin dielectric film coating was observed. Discharge-current waveform, discharge gap length, current rise time, discharging photograph, and current peak value were recorded by the authors' measuring system. The initial charge supply effects by irradiation of /spl beta/-ray or ultraviolet light were found to be not highly apparent; that is, the reproducibility of ESD experiments was not greatly improved. Surface-charge-polarity dependence of surface ESD between charged and uncharged dielectric films decreases with increase of the film thickness. The discharge gap length of ESD with a 1.5 /spl mu/m uncharged film coating on the spherical electrode decrease to 50 or 70% compared with that between a charged film and a bare spherical metal electrode. Peak current and transferred charge value of ESD also decrease to roughly one-third of that between the film and the spherical electrode. >