A method for producing thin films and corresponding layer

The invention relates to a coating method comprising the steps of a) providing a mixture or a pure substance, comprising or consisting of inert, liquid precursors, b) applying a liquid layer of the mixture or pure substance to a surface to be coated, c) crosslinking the liquid precursors by means of radiation having a wavelength of ≦ 250 nm, so that a solid layer is formed from the mixture and the layer comprising ≧ 10 atomic%, based on the amount of the atoms contained in the layer without H and F, and so that the C contained in the layer is a maximum of 50 atomic% of C, based on the amount of carbon atoms, part of a methoxy group contained in the layer. It further relates to means of this method can be produced or generated layers and uses thereof, and corresponding coated articles and their uses.