Mechanical-electrostatic coupling and distortion research for MEMS line vibration gyroscope

Aim at this phenomenon,the mechanical-electrical error model and the distortion model because of the asymmetry of the configuration of the MEMS line vibration gyroscope are built.There is simulation analysis by using Matlab.And according to the method of Limited Element,the distributing fig of the electric field and the electrostatic force and the distortion of combs because of the asymmetry of the configuration are got by using ANSYS.These researches act important effect on improving the precision of the MEMS line vibration gyroscope.