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Acemap > Paper > Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl 2 (TMPDA) and Tert‐Butylhydrazine as Precursors

Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl 2 (TMPDA) and Tert‐Butylhydrazine as Precursors

2019 
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