Optical Beam Deflection in Semiconductors with Electron Beam Excitation

John C. Murphy,J. W. Maclachlan Spicer,Robert B. Givens,L. C. Aamodt,G. Chang

Optical Beam Deflection in Semiconductors with Electron Beam Excitation

1990

John C. Murphy
J. W. Maclachlan Spicer
Robert B. Givens
L. C. Aamodt
G. Chang

Optical beam deflection experiments performed in a scanning electron microscope are used to investigate electron-beam-specimen interactions and thermal and electronic diffusion in semiconductors.

Keywords:

Ion beam
Scanning electron microscope
Cathode ray
Deflection (engineering)
Laser beam quality
Beam parameter product
Semiconductor
Optics
Electron beam welding
Materials science
Excitation

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