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THE MODULAR PRINCIPLE OF VACUUM-PLASMA EQUIPMENT DESIGN FOR PLASMA ETCHING SYSTEM FOR MICROELECTRONICS
THE MODULAR PRINCIPLE OF VACUUM-PLASMA EQUIPMENT DESIGN FOR PLASMA ETCHING SYSTEM FOR MICROELECTRONICS
2019
V. V. Odinokov
V. V. Panin
Keywords:
Microelectronics
Modular design
Plasma
Plasma etching
Optoelectronics
Materials science
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