Конструирование газовых микросистем на основе нанопористого анодного оксида алюминия

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermal-conductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations.