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Atomic Emission Spectra Diagnosis and Electron Density Measurement of Semiconductor Bridge (SCB) Plasma
Atomic Emission Spectra Diagnosis and Electron Density Measurement of Semiconductor Bridge (SCB) Plasma
2010
Hongyan Feng
Shunguan Zhu
rin
Xiaoxia Wan
liyan
Ruiqi Shen
Keywords:
Plasma
Semiconductor
Chemistry
Analytical chemistry
Atomic emission spectroscopy
Electron density
Atomic physics
Correction
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