High coupling efficiency electric injection integration silicon-based laser

2015 
The invention discloses a high coupling efficiency electric injection integration silicon-based laser, which is a laminated structure, and comprises a silicon substrate, an insulating layer, a large speckle semiconductor active chip, top layer silicon and a low refractive index layer. The upper surface of the silicon substrate is provided with a routine part and an etched part which is etched; the insulating layer is arranged on the routine part of the silicon substrate; the large speckle semiconductor active chip is arranged on the etched part of the silicon substrate; the top layer silicon is arranged on the upper surface of the insulating layer; the low refractive index layer is arranged on the side of the upper surface of the top layer silicon proximate to the large speckle semiconductor active chip. The high coupling efficiency electric injection integration silicon-based laser can directly and efficiently output single mode laser, and be commercialized, has the advantages of compact structure, simple process, and high efficiency and stability, and possesses a broad application prospect in the fields such as optical interconnection, optical communication, spectrum determination, optical remote sensing, etc.
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