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Influence of Al Preflow Time on Surface Morphology and Quality of AlN and GaN on Si (111) Grown by MOCVD
Influence of Al Preflow Time on Surface Morphology and Quality of AlN and GaN on Si (111) Grown by MOCVD
2017
Boting Liu
Ping Ma
Xilin Li
Junxi Wang
Jinmin Li
Keywords:
Atomic physics
Metalorganic vapour phase epitaxy
Physics
Molecular physics
Optics
Optoelectronics
Morphology (linguistics)
Correction
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