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Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography
Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography
2011
Neo Yoichiro
Takagi Yasuo
Fujino Takahiro
Koike Akifumi
Nagao Masayoshi
Yoshida Tomoya
Nishi Takashi
Murata Hidekazu
Sakai Kentaro
Aoki Toru
Mimura Hidenori
Keywords:
Lithography
Electron
Materials science
Analytical chemistry
Next-generation lithography
Optoelectronics
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