DiCI5a: Multilayer capacitors with copper inner electrodes

Abstract A new Multilayer Capacitor(MLC), made from relaxor material and copper inner electrodes was fabricated by using atmosphere controlled heat treatments. Pb(Mg1/3Nb2/3)O3-PbTiO3 modified material was used as a dielectric material. MgO and CaO additives were used to keep its IR in a low PO2 sintering state. The organic binder burnout section needs accurate atmosphere control. The carbon residue causes lead oxide to be reduced to metal, and other serious influences. On the other hand, treatment in higher PO2 induces copper oxidation. In this study, as a new technique, an H2-H2O-N2 gas mixture was used for the binder burnout section. The obtained MLC has a high capacitance, low DC bias dependence.