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30aPS-58 Potential energy surface (PES) for reactive ion etching (RIE) on FeNi_4 cluster
30aPS-58 Potential energy surface (PES) for reactive ion etching (RIE) on FeNi_4 cluster
2006
R. Muhida
Melanie David
Shigeno Matsumoto
H. Nakanishi
H. Akinaga
H. Kasai
Keywords:
Chemistry
Reactive-ion etching
Potential energy surface
Inorganic chemistry
Materials science
Chemical engineering
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