Energy values of very low-energy ion beams

Ion beams of energy levels less than 100 eV are used to form special films with excellent physical and chemical properties. However, their energy values are inaccurate unless the plasma potentials are taken into account with their total energies. For simple plasmas which consist of singly-charged ions of a single species and electrons of a single electron temperature, we have formerly reported how to obtain accurate values. In this paper, we further investigate the exact energy values for a source plasma having double electron temperatures as is often the case with industrially used ion sources.