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Direct etching process for nanofabrication of crosslinked PTFE using focused ion beam
Direct etching process for nanofabrication of crosslinked PTFE using focused ion beam
2008
Naoyuki Fukutake
Tatsuya Urakawa
Nozomi Miyoshi
Akihiro Oshima
Masakazu Washio
Yoshinori Matsui
Shu Seki
Seiichi Tagawa
Keywords:
Deposition (law)
Focused ion beam
Polytetrafluoroethylene
Nanotechnology
Surface finishing
Nanolithography
surface coating
Etching (microfabrication)
Polymer
Materials science
Correction
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