Self-Organization of Dimensional and Concentration Diversity in a CNx : EuyOz Film Clusterized Structure

The structure of diamond-like CNx : EuyOz films obtained by magnetron sputtering of a composite carbon–metal–oxide target in a nitrogen atmosphere has been examined. It has been shown that the components of the target and working atmosphere self-organize, with europia and carbon oxide entering into an intense solid-state substitution reaction to form CNx : EuyOz complexes. These complexes show up in fine clusters of a growing film. It was found that samples grown at an intermediate working gas pressure have a unique uniformly variable structure filled with different clusters.