Sructural changes at solid surfaces irradiated with femtosecond, intense XUV pulses generated by TTF-FEL

Abstract Interaction of ultrafast (∼ 50 fs), high intensity (up to 10 13 W/cm 2 ) XUV (λ ∼ 85 nm) FEL beam with solids has been studied at the TTF-FEL facility. Damaged surfaces have been investigated using light, electron, and atomic force microscopy. Influence of the FEL radiation intensity on the structural changes at the surfaces has been investigated. Results obtained for different materials, i. e. metals (Au), semiconductors (Si), inorganic insulators (Ce:YAG, BaF 2 , SiO 2 ), and organic polymers (polymethylmethacrylate - PMMA), are compared. Laser-induced periodic surface structures (LIPSS) were observed at amorphous carbon (a-C) layers.