Guide device for bulk silicon wafers

2012 
The invention discloses a guide device for bulk silicon wafers, which solves the problems that the existing guide device is for one-dimension guiding, is easily affected by the outside, and is poor in guidance quality. The guide device for the bulk silicon wafers comprises bottom guide plates capable of ascending and descending; side guide plates are arranged above the two sides of each bottom guide plate; and the side guide plates are connected with side guide plate drive mechanisms capable of driving the side guide plates to perform straight reciprocating motion between the two side guide plates. When the silicon wafers move above the bottom guide plates, the bottom guide plates ascend stably; the silicon wafers in a silicon wafer box enter the guide grooves in the bottom guide plates; the bottom guide plates continue ascending to support the silicon wafers in the silicon wafer box and feed the silicon wafers to the guide grooves formed by the side guide plates; and then, the side guide plates can be adjusted laterally, so as to ensure that all of the silicon wafers can keep aligned and maintain an identical gap. In this way, the guiding of the bulk silicon wafers can be well accomplished, and the reliability in taking the wafers is improved.
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