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Growth kinetics of epitaxial films of cubic silicon carbide
Growth kinetics of epitaxial films of cubic silicon carbide
1980
S. I. Vlaskina
O. T. Sergeev
V. P. Smirnov
Keywords:
Micropipe
Carbide
Metallurgy
Composite material
Nanocrystalline silicon
Materials science
Silicon carbide
Epitaxy
Silicon
cubic silicon carbide
growth kinetics
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