イオン化蒸着法によるTi-6Al-4V基板上へのダイヤモンドライクカーボン系二層膜の作製

A double-layers film, in which the top layer was a diamond-like carbon (DLC) film and the bottom layer was a compositionally graded film of silicon and carbon compounds with decreasing C/Si atomic ratio to a substrate, was successfully formed on a Ti-6Al-4V substrate by an ionization deposition method. In the film deposition process, a benzene vapor was used for the DLC deposition, and hexamethyldisiloxane and benzene vapors were used for the compositionally graded film of silicon and carbon compounds, as source gasses. The results of ball-on-disk and scratching tests showed that the double-layers film with graded composition provided a low friction coefficient, high wear resistance and good adhesion with the Ti-6Al-4V substrate compared to a single-layer DLC film. The DLC-based double-layers film developed in this study is very effective in extending the applications of the Ti-6Al-4V alloy for antifriction components.