In Situ Spectroscopic Ellipsometry for Real Time Semiconductor Growth Monitor

Blaine D. Johs,Duane E. Meyer,Gerald T. Cooney,Huade Yao,Paul G. Snyder,John A. Woollam,J. L. Edwards,G.N. Maracas

In Situ Spectroscopic Ellipsometry for Real Time Semiconductor Growth Monitor

1990

Blaine D. Johs
Duane E. Meyer
Gerald T. Cooney
Huade Yao
Paul G. Snyder
John A. Woollam
J. L. Edwards
G.N. Maracas

A modular spectroscopic ellipsometer for in situ and ex situ materials analysis is described, and results for in situ MBE growth of GaAs/AlGaAs are reported.

Keywords:

Ellipsometry
Reflectivity
Molecular beam epitaxy
Gallium arsenide
Analytical chemistry
Semiconductor
Materials science
In situ
Optoelectronics
spectroscopic ellipsometry

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations