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Photoinduced Polymerization of Vapor Deposited Low Dielectric Films
Photoinduced Polymerization of Vapor Deposited Low Dielectric Films
2002
V.J. Bellitto
M J Brooks
J. P. Long
P. G. Santangelo
M. L. Rebbert Russell
Keywords:
Chemical engineering
Dielectric
Materials science
Polymerization
Correction
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