32.1: Invited Paper: Amorphous Silicon Thin‐Film Transistors with Planarized Gate Insulators

High-performance, amorphous silicon thin-film transistors (TFTs) with planarized gate insulators have been developed. Such TFTs can adopt thick gate metal, thin active layer and thin gate insulator, therefore are very suitable to the high-performance, large-area TFT-LCDs.