Old Web
English
Sign In
Acemap
>
Paper
>
Effect of impurities on the dielectric properties of silicon nitride
Effect of impurities on the dielectric properties of silicon nitride
1982
T. V. Andreeva
P. P. Pikuza
T. S. Bartnitskaya
Yu. M. Goryachev
T. Ya. Kosolapova
Keywords:
Gate dielectric
High-κ dielectric
Dielectric
Silicon nitride
Impurity
Metallurgy
Composite material
Nanocrystalline silicon
Materials science
Silicon
Nitride
metallic materials
Correction
Source
Cite
Save
Machine Reading By IdeaReader
4
References
1
Citations
NaN
KQI
[]