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Dependence on Resist Stripping Efficiency to Irradiating Beam Size in Advanced Laser Resist Stripping Method
Dependence on Resist Stripping Efficiency to Irradiating Beam Size in Advanced Laser Resist Stripping Method
2015
Tomosumi Kamimura
Yuta Kuroki
Takuma Murakami
Kosuke Nuno
Masaya Akimoto
Yoshiyuki Harada
Takashi Nishiyama
Hideo Horibe
Keywords:
Laser
Materials science
Electron-beam lithography
Stripping (chemistry)
Optics
Beam (structure)
Analytical chemistry
Resist
Optoelectronics
beam size
heat stress
Correction
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