Hybrid integration of an evanescently coupled AlGaAs microdisk resonator with a silicon waveguide by nanoscale-accuracy transfer printing

Hybrid integration of a III-V microdisk resonator on a silicon-on-insulator waveguide platform is demonstrated. Transfer printing with nanoscale accuracy is used to micro-assemble an evanescently coupled all-pass microdisk resonator with a targeted coupler gap of 100 nm using pre-fabricated AlGaAs and silicon components. Transmission measurements show hybrid resonances with a loaded Q-factor of 7×103 and a cavity finesse of over 100.