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Semiconductor capacitive acceleration sensor and a manufacturing method thereof
Semiconductor capacitive acceleration sensor and a manufacturing method thereof
1989
kurutuku ben
masayuki miki
satou kazuo
sigeki tutiya
akira koide
norio itikawa
masa dai matumoto
yukiko kawai
hiromiti ebine
kiyomitu suzuki
Keywords:
Acceleration
Capacitive sensing
Materials science
Semiconductor
Electronic engineering
Optoelectronics
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