Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions

: A newly developed SEM system has been utilized for obtaining ultralow-magnification SEM images. It is a successful combination of the modern SEM equipped with a motor drive stage fully controlled with PC and digital image processing techniques for automatic montage. In order to accomplish a practical system, several problems peculiar to the field of SEM, i.e. raster rotation, peripheral distortion and charging effects, are discussed and solved. The function of ultralow-magnification (whole area) observation is important during a scanning electron microscopy session.