20.3: The Organic Passivation Layer for Flexible Thin Film Transistors

Using flexible organic passivation has lots of advantages compared with traditional in-organic passivation such as simpler process, lower leakage current (Ioff = 10−14 A), lower temperature process (<200°C) and better flexibility. Photo-sensitive type organic passivation was succeeded in replacing in-organic passivation (SiNx) in 6″ SVGA active-matrix EPD.