Current transport mechanism of AlGaN/GaN Schottky barrier diode with fully recessed Schottky anode

Both the forward and reverse-bias current transport mechanisms of an AlGaN/GaN Schottky barrier diode with a fully recessed Schottky anode (recessed-SBD) are investigated for the first time. A two-dimensional (2D) device simulation gives insight into the electronic transport. The difference between the forward and reverse conduction paths enables the reduction in Von without sacrificing the low reverse leakage current properties. The results of temperature-dependent current–voltage (T–I–V) measurements show that thermionic field emission (TFE) is the dominant current transport mechanism for forward bias. In the reverse-bias region above the pinch-off voltage, two mechanisms codetermine leakage currents, which contain Frenkel–Poole emission from the overlapped planar contact and tunneling from the recessed sidewall contact. Below the pinch-off voltage, the leakage currents are observed to have exponential temperature dependence, which may be consistent with trap-assisted tunneling (TAT).