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Photoresist Absorption Measurement at Extreme Ultraviolet (EUV) Wavelength by Thin Film Transmission Method
Photoresist Absorption Measurement at Extreme Ultraviolet (EUV) Wavelength by Thin Film Transmission Method
2019
Atif Shehzad
Yannick Vesters
Danilo De Simone
Ivan Pollentier
Stefano Nannarone
Geert Vandenberghe
Stefan De Gendt
Keywords:
Photochemistry
Wavelength
Absorption (pharmacology)
Materials science
Extreme ultraviolet
Photoresist
Thin film
Extreme ultraviolet lithography
Optoelectronics
transmission method
Correction
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