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High-Performance MetalInsulatorMetal Capacitors With Stacked Dielectric
High-Performance MetalInsulatorMetal Capacitors With Stacked Dielectric
2010
Bing-Yue Tsui
Hsiao-Hsuan Hsu
Chun-Hu Cheng
Keywords:
Leakage (electronics)
Electronic engineering
Capacitor
Gate dielectric
High-κ dielectric
Chemistry
Dielectric
Analytical chemistry
Film capacitor
Dielectric absorption
Liquid dielectric
Correction
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