Characterization of a micro-fabricated digital actuator array as a micro-factory conveyor device

In this paper we present the characterization of a digital actuator array (DAA), based on a 2×2 matrix of digital electromagnetic actuators, as a conveyor device towards a micro-factory application. A proposed conveyance principle of the DAA was experimentally applicated and validated. The displacement of the conveyed object along one and two dimensions, the speed and the energy consumption reached by this DAA were characterized. Displacements from 38.3 µm up to 1181.9 µm were measured with a maximum speed of 1990.4 µm/s. Energy calculations showed an efficiency up to 282.5 µm/J and the 2 DOF capability of the DAA was experimentally demonstrated.