Pressure sensor with top layer
2012
The invention relates to a pressure sensor 1 comprising a substrate 2 with a trained measuring diaphragm 3 and an electrically conductive cover layer 4, which electrical contacts elements 5, 6, 7, 8 and being opposite to the substrate 2 are electrically insulated by an insulating layer. 9 The covering layer 4 is in this case is so structured that two independent measurements of the respective resistance between the two contact elements 5, 6, 7, 8 are possible in two spaced electrically isolated regions 10,. 11 The areas 10, 11 of the cover layer 4 are used to shield external electromagnetic influences on the sensor elements 12, 13 of the measuring diaphragm 3 to detection of damage to the measuring diaphragm 3, and the precise temperature determination.
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