Preparation of SnO_2∶Sb Film by Spray Pyrolysis Technique and Heat Treatment

By using SnCl4·5H2O and SbCl3 as raw materials,the Sb-doped SnO2 transparent conductive thin films were prepared on glass substrates by spray pyrolysis technique.The samples were characterized by using X-ray photoelectron spectroscopy analyzer(XPS),X-ray diffraction(XRD) as well as ultraviolet-visible light absorption spectrometer.The structural,electrical and optical properties of the films were investigated in detail.The experimental results show that the film is still a rutile structure,while the amount of doped antimony is(1.0～1.5)wt% and substrate temperature is 500 ℃,the sheet resistance is in the range of 0.8 ～ 3.5 Ω /□. The visible light transmittance reaches 80% and infrared light reflectivity reaches 80 %.The changes of conductivity for thin film were a trend,after the samples are annealed in the O2 and N2 atmosphere.When the samples temperature reaches 550 ℃,the turning point at the conductivity curve appears at the same time.