EUV and soft X‐ray transition radiation from MIRRORCLE‐type tabletop synchrotrons

MIRRORCLE‐20SX tabletop synchrotron is under development for EUV lithography. We measured the soft X ray power from the existing synchrotron MIRRORCLE‐6X (6MeV machine). Transition radiation power from one thin foil target was detected by a plastic scintillator, which is calibrated by using conventional synchrotron radiation source at AIST. The output EUV power was 2.6 mW. From the experimental result of MIRRORCLE‐6X we can extrapolate the EUV power for the 20MeV machine as large as one watt per foil. We expect 100 watt EUV by 100 of foils.