Bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and actuating device thereof

The invention relates to a bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and an actuating device thereof and belongs to the technical field of microfluidic control. The problems of poor sealing reliability and instability in amplification factors of hydraulic amplification by means of matching piezoelectric actuating with a hydraulic amplifier in existing microfluidics are solved. A first accommodating cavity retainer of the servo valve is in the shape of a drum, a through hole is arranged at the center bottom of the drum, a piezoelectric diaphragm covers and is fixed on the first accommodating cavity retainer, an outlet side of the first accommodating cavity retainer and an inlet side of a second accommodating cavity retainer are communicated in a sealing manner through a bellows, and an elastic diaphragm covers and is fixed on an outlet side of the second accommodating cavity retainer. The actuating device comprises a piezoelectric servo amplifier, a digital-to-analog converter, a microprocessor, an analog-to-digital converter and a pressure sensor. The bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and the actuating device thereof are applicable to a piezoelectrically-hydraulically-actuated microfluidic system.