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MEMS characterization LDRD:Final report (FY03-FY05).
MEMS characterization LDRD:Final report (FY03-FY05).
2005
Therese A. Ordonez
Kevin R. Zavadil
Jason R. Brown
Michael S. Kent
R. L. Simpson
D. R. Tallant
James Anthony Ohlhausen
Manuel Joseph Garcia
Steven M. Thornberg
Keywords:
Nanotechnology
Miniaturization
Technology assessment
Microelectromechanical systems
Manufacturing engineering
Materials science
microelectronic circuits
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