Method for maintaining balance of grinding rate of grinding machine table

The invention relates to the field of chemical mechanical grinding, in particular to a method for maintaining balance of the grinding rate of a grinding machine table. The grinding machine table comprises a grinding disc, a grinding pad, a grinding head and a grinding pad dresser. The method comprises the steps that a semiconductor device to be ground is provided, the semiconductor device is placed on the grinding machine table, and the chemical mechanical grinding technique is conducted on the semiconductor device. The pressurization function of the grinding head is adopted, and the loss of the grinding rate due to the change of the service life of the grinding pad and the grinding pad dresser is made up by adjusting the pressure on the grinding disc by the grinding head, and thus the balance of the grinding rate is maintained.