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A Plasma Purification Method for Plasma Source Ion Implantation Doping of Semiconductors
A Plasma Purification Method for Plasma Source Ion Implantation Doping of Semiconductors
1996
T.G. Snodgrass
Dina Arnott
Maura Jenkins
Leon Shohet
John H. Booske
Mark Kushner
Keywords:
Ion implantation
Inorganic chemistry
Materials science
Plasma
Doping
Semiconductor
purification methods
Correction
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