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Amorphous Silicon Self‐Rolling MEMS: From Residual Stress Control to Complex 3D Structures
Amorphous Silicon Self‐Rolling MEMS: From Residual Stress Control to Complex 3D Structures
2019
Rui M. R. Pinto
Virginia Chu
João Pedro Conde
Keywords:
Metallurgy
Amorphous silicon
Composite material
Residual stress
Materials science
Microelectromechanical systems
Microstructure
Thin film
Correction
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